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CLEANROOM DESIGN – Semiconductor

Virtual Cleanroom Balancing

- Minimize Pressure Gradient

Modeling the entire cleanroom identifies large scale-pressure gradients that may affect airflow patterns throughout the cleanroom. These figures show a high pressure region in the southeast corner of the cleanroom, which was due to a cleanroom expansion that did not have a raised floor. To correct the pressure imbalance the raised floor in the other parts of the cleanroom was adjusted in the model to eliminate the pressure gradient thereby minimizing the horizontal airflow migration.

Virtual Cleanroom Balancing

- Minimize Deviation from vertical flow (laminarity)

The airflow patterns within this cleanroom were found to be out of specification in multiple areas due to the unusual shape of the clean bays and return chase. Floor balancing was performed virtually, with the use of airflow modeling, to bring the airflow into specification. Ultimately, the cleanroom balancing contractor was able to use this information to balance the floor in record time, saving the project approximately $50,000 in commissioning costs.

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